Nanoindentation response of a thin InP membrane
Identifieur interne : 006215 ( Main/Repository ); précédent : 006214; suivant : 006216Nanoindentation response of a thin InP membrane
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Abstract
Small and thin InP membranes have been microfabricated and released on top of an InP substrate by photolithography, InGaAs preferential etching in InP/InGaAs/InP substructures and drying with CO2 at critical point. The mechanical response of the obtained 40 μm in diameter and 400 nm thin membranes could be tested at different loads by nanoindentation. While keeping their epitaxial orientation, delamination of the membrane occurred and then its cracking was detected as a pop-in on the loading curve under larger loads. Occurrence of delamination was detected using interferential microscopy. Transmission electron microscopy was used to get further insight into the deformation of the membranes.
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<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Nanoindentation response of a thin InP membrane</title><author><name sortKey="Le Bourhis, E" uniqKey="Le Bourhis E">E. Le Bourhis</name><affiliation wicri:level="4"><inist:fA14 i1="01"><s1>Laboratoire de Métallurgie Physique, Université de Poitiers, UMR 6630 CNRS, SP2MI-T2-Bd Marie et Pierre Curie, B.P. 30179</s1><s2>86962 Futuroscope-Chasseneuil</s2><s3>FRA</s3><sZ>1 aut.</sZ></inist:fA14><country>France</country><placeName><region type="region" nuts="2">Poitou-Charentes</region><settlement type="city">Futuroscope-Chasseneuil</settlement></placeName><orgName type="university">Université de Poitiers</orgName></affiliation></author><author><name sortKey="Patriarche, G" uniqKey="Patriarche G">G. Patriarche</name><affiliation wicri:level="3"><inist:fA14 i1="02"><s1>Laboratoire de Photonique et de Nanostructures, UPR 20 CNRS, Route de Nozay</s1><s2>91460 Marcoussis</s2><s3>FRA</s3><sZ>2 aut.</sZ></inist:fA14><country>France</country><placeName><region type="region" nuts="2">Île-de-France</region><settlement type="city">Marcoussis</settlement></placeName></affiliation></author></titleStmt><publicationStmt><idno type="inist">08-0304540</idno><date when="2008">2008</date><idno type="stanalyst">PASCAL 08-0304540 INIST</idno><idno type="RBID">Pascal:08-0304540</idno><idno type="wicri:Area/Main/Corpus">006872</idno><idno type="wicri:Area/Main/Repository">006215</idno></publicationStmt><seriesStmt><idno type="ISSN">0022-3727</idno><title level="j" type="abbreviated">J. phys., D. Appl. phys. : (Print)</title><title level="j" type="main">Journal of physics. D, Applied physics : (Print)</title></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Cracking</term><term>Delamination</term><term>Etching</term><term>Indium phosphide</term><term>Nanoindentation</term><term>Photolithography</term><term>Substructure</term><term>Thin films</term><term>Transmission electron microscopy</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>Nanoindentation</term><term>Photolithographie</term><term>Gravure</term><term>Sous structure</term><term>Délaminage</term><term>Fissuration</term><term>Microscopie électronique transmission</term><term>Phosphure d'indium</term><term>Couche mince</term><term>InP</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Small and thin InP membranes have been microfabricated and released on top of an InP substrate by photolithography, InGaAs preferential etching in InP/InGaAs/InP substructures and drying with CO<sub>2</sub> at critical point. The mechanical response of the obtained 40 μm in diameter and 400 nm thin membranes could be tested at different loads by nanoindentation. While keeping their epitaxial orientation, delamination of the membrane occurred and then its cracking was detected as a pop-in on the loading curve under larger loads. Occurrence of delamination was detected using interferential microscopy. Transmission electron microscopy was used to get further insight into the deformation of the membranes.</div></front></TEI><inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>0022-3727</s0></fA01><fA02 i1="01"><s0>JPAPBE</s0></fA02><fA03 i2="1"><s0>J. phys., D. 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All rights reserved.</s1></fA44><fA45><s0>16 ref.</s0></fA45><fA47 i1="01" i2="1"><s0>08-0304540</s0></fA47><fA60><s1>P</s1><s2>C</s2></fA60><fA61><s0>A</s0></fA61><fA64 i1="01" i2="1"><s0>Journal of physics. D, Applied physics : (Print)</s0></fA64><fA66 i1="01"><s0>GBR</s0></fA66><fC01 i1="01" l="ENG"><s0>Small and thin InP membranes have been microfabricated and released on top of an InP substrate by photolithography, InGaAs preferential etching in InP/InGaAs/InP substructures and drying with CO<sub>2</sub> at critical point. The mechanical response of the obtained 40 μm in diameter and 400 nm thin membranes could be tested at different loads by nanoindentation. While keeping their epitaxial orientation, delamination of the membrane occurred and then its cracking was detected as a pop-in on the loading curve under larger loads. Occurrence of delamination was detected using interferential microscopy. 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